刻蝕機(jī)是什么
What is an etcher
實(shí)際上狹義理解就是光刻腐蝕，先通過光刻將光刻膠進(jìn)行光刻曝光處理，然后通過其它方式實(shí)現(xiàn)腐蝕處理掉所需除去的部分。隨著微制造工藝的發(fā)展；廣義上來講，刻蝕成了通過溶液、反應(yīng)離子或其它機(jī)械方式來剝離、去除材料的一種統(tǒng)稱，成為微加工制造的一種普適叫法。
In fact, it is understood in a narrow sense as lithography corrosion. First, the photoresist is exposed by lithography, and then the parts to be removed are etched by other means. With the development of micro manufacturing technology; Broadly speaking, etching is a general term for stripping and removing materials through solutions, reactive ions or other mechanical means, and it has become a general term for micromachining.